High-Resolution X-Ray Micro-Optics: Technologies and Materials
The prospects for using high-resolution X-ray microlenses for coherent visualization tasks are discussed. Modern technologies and methods of microprocessing for the manufacture of 2D microlenses are considered using laser systems, ion-beam lithography, and additive technologies as an example. The efficiency of various materials for X-ray micro-optics applications is evaluated, and the time spent on manufacturing 100 nm resolution micro objectives using ion-beam lithography systems is optimized.
Authors
- Ivan Lyatun (ORCID: https://orcid.org/0000-0002-4988-8077)
- Svetlana Lyatun (ORCID: https://orcid.org/0000-0001-8493-3366)
- Polina Medvedskaya (ORCID: https://orcid.org/0000-0003-4210-7255)
- Anton S. Korotkov (ORCID: https://orcid.org/0000-0002-5141-9528)
- A. Snigirev (ORCID: https://orcid.org/0000-0002-8892-1925)
- Sergey Shevyrtalov
Institutions
- Immanuel Kant Baltic Federal University (RU)
Publication Details
- Journal
- Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
- Published
- 2024-12-01
- DOI
- https://doi.org/10.1134/s1027451024701489
- Primary Topic
- Advanced X-ray Imaging Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00