Smartification of Control Technology in Semiconductor Equipment
The uniform temperature control for heating process systems in semiconductor equipment is implemented to a temperature controller which is supplied to the semiconductor equipment manufacturer. In composition of the business, the adequacy of the relations between companies of the control technology is an important issue. In this paper, comparison of logical approach and data-driven approach of the uniform temperature control is described.
Authors
- Masato Tanaka (ORCID: https://orcid.org/0000-0003-0787-0335)
- Masahide Hamaguchi (ORCID: https://orcid.org/0000-0002-8651-4445)
Institutions
- Azbil (Japan) (JP)
- Mitsubishi Electric (United States) (US)
Publication Details
- Journal
- IEEJ Transactions on Electronics Information and Systems
- Published
- 2025-02-28
- DOI
- https://doi.org/10.1541/ieejeiss.145.281
- Primary Topic
- Advanced Research in Systems and Signal Processing
- Type
- article
- Field-Weighted Citation Impact
- 0.00