Preference of helicon plasma discharge directionality due to standing waves

Abstract Helicon plasma has high ionization efficiency. It has been used in semiconductors, space propulsion, and nuclear fusion as a high-density plasma source. This paper establishes a three-dimensional numerical model of argon helicon plasma discharge based on the detailed consideration of particle collision and chemical reaction. The directivity of helicon plasma discharge under three-dimensional non-uniform magnetic field distribution is studied by the finite element method, and the wave propagation and power deposition are analyzed. In this paper, the direction of helicon plasma discharge is changed by the antenna helicity. It is considered that the standing helicon wave is one of the important reasons for this phenomenon.