Super-Resolution Confocal Scanning Imaging with Metasurface

Metasurface-based imaging is a promising technology due to its low hardware cost and system complexity. However, the resolution is very limited due to its small aperture size and long carrier wavelength. To improve the resolution of metasurface-based imaging, we propose a two-step deconvolution based on a confocal scanning imaging system. First, we develop a focal plane scanning imaging system with confocal configuration to provide enough SNR. Meanwhile, the highly focused beam can be measured to get the point spread function (PSF). Next, regularized deconvolution with sparse and total variation (TV) prior is applied to denoise and improve the resolution slightly. Finally, we apply Richardson-Lucy (RL) deconvolution to further improve the resolution. Both simulations and experiments demonstrate the proposed method can greatly improve the resolution and contrast of the imaging results.