Design of a Novel Accelerometer Based on Cavity Optomechanical Systems

An accelerometer is an inertial sensor used to measure the magnitude of acceleration and vibration frequency of a moving object. It finds wide applications in fields such as aerospace, autonomous driving, and unmanned equipment to enable inertial navigation or inertial measurement. In traditional accelerometers, thermal noise has the greatest impact on detection accuracy. To effectively reduce thermal noise, this paper designs a novel accelerometer structure based on a cavity optomechanical system. The design was optimized through simulations using COMSOL software, which confirmed the structural validity of the proposed accelerometer. Additionally, the first-order modal frequency and linearity simulation results from COMSOL were verified using Simulink software, demonstrating the reasonableness of the results.