Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors

MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR.