Comparative Analysis of MEMS Tuning Fork Gyroscope Designs with Microlever Amplification Mechanism for Enhanced Sensitivity and Robustness

This paper presents a comparative analysis of two MEMS Tuning Fork Gyroscope (TFG) designs employing microlever amplification mechanisms for sensitivity amplification in the sense mode. An input frame added in microlever amplification frame to increase the robustness of MEMS gyroscope. Design A incorporates a non-anchored input frame in microlever, while Design B features an anchored input frame in microlever. Frequency response analysis and modal analysis were performed using CoventorMEMS+ to evaluate the impact of input frame of microlever on undesired mode suppression, mechanical sensitivity, and robustness. The results indicate that anchoring the microlever in Design B significantly reduces quadrature displacement arise because of environmental linear acceleration in the sense mode while maintaining comparable amplified sensitivity to Design A. Design B offers enhanced stability and robustness, making it a more suitable candidate for precision applications such as autonomous vehicle navigation systems.