Magneto-Mechanically Coupled Si₃N₄ Trampoline and Piezoelectric Resonator Devices

The main objective of this work is to study the coupling between spin transitions or excitations and mechanical excitations in micro-opto-electro-mechanical devices to design efficient spin sensors for quantum computers. We report the effect of spin polarization in negatively charged nitrogen-vacancy (NV-) color centers in diamond and in yttrium-iron-garnets integrated with mechanical resonators. Two mechanical resonators consisting of a stoichiometric silicon nitride trampoline and a piezoelectric disk were used. The results clearly show spin transitions and mechanical vibrations of the resonators are coupled through magneto-elastic and magneto-striction effects.