Characterization of SiC Selective Laser Fabrication
An efficient Si-SiC electronic and photonic co-design laser fabrication process is demonstrated. The product material surface condition and device electrical properties are well characterized. This work also presents comparable results between the simulated and measured data.
Authors
- T. Hogan (ORCID: https://orcid.org/0000-0002-3086-2483)
- Haojun Wang (ORCID: https://orcid.org/0009-0000-5773-1144)
Institutions
- Michigan State University (US)
Publication Details
- Published
- 2024-10-21
- DOI
- https://doi.org/10.1109/nmdc58214.2024.10894285
- Citations
- 1
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.18