NanoFrazor Technology – Enabling Thermal Scanning Probe Lithography and Direct Laser Sublimation for Advanced 2D and Grayscale Structure Fabrication

The NanoFrazor technology is utilizing fabrication capabilities of thermal scanning probe lithography (t-SPL) and direct laser sublimation (DLS) to perform nanopatterning, either physical or chemical in nature, on a diversity of materials and substrates. With such diversity, there are still several challenges to overcome such as performing high-resolution DLS patterning on heterogeneous surfaces as well as low-fill factor nanopatterning that are often used in metasurface designs. This presentation will discuss work that is being performed to address such topics as well as an introduction to the fundamentals and workings of t-SPL and DLS for the N anoFrazor technology.

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Publication Details

Published
2024-10-21
DOI
https://doi.org/10.1109/nmdc58214.2024.10894124
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
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NanoFrazor Technology – Enabling Thermal Scanning Probe Lithography and Direct Laser Sublimation for Advanced 2D and Grayscale Structure Fabrication

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Advanced MEMS and NEMS Technologies
article

NanoFrazor Technology – Enabling Thermal Scanning Probe Lithography and Direct Laser Sublimation for Advanced 2D and Grayscale Structure Fabrication

Jana Chaaban, Nicholas R. Hendricks, Myriam Käppeli, J. C. Stark, Eliott Clerc
article en

Abstract

The NanoFrazor technology is utilizing fabrication capabilities of thermal scanning probe lithography (t-SPL) and direct laser sublimation (DLS) to perform nanopatterning, either physical or chemical in nature, on a diversity of materials and substrates. With such diversity, there are still several challenges to overcome such as performing high-resolution DLS patterning on heterogeneous surfaces as well as low-fill factor nanopatterning that are often used in metasurface designs. This presentation will discuss work that is being performed to address such topics as well as an introduction to the fundamentals and workings of t-SPL and DLS for the N anoFrazor technology.

Openalex Percentile: Top 74%
Advanced MEMS and NEMS Technologies
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