Young's Modulus of Ultra-Thin Metals Calculated Using Molecular Dynamics

The Young's modulus (YM) of ultra-thin for copper, ruthenium, and cobalt films is calculated using molecular dynamics simulations performed on Synopsys' QuantumATK software. Metal films varying from 17 Å-1400 Å are studied and show convergence to reported bulk Young's modulus values with increasing film thicknesses. The proposed simulation methodology may be utilized to examine other metal or dielectric films of interest.