Toward Phonon-Limited Transport in Two-Dimensional Transition Metal Dichalcogenides by Oxygen-Free Fabrication

Developing future electronics will require aggressive scaling of the channel material thickness while maintaining device performance. Two-dimensional (2D) semiconductors are promising candidates to sustain further device scaling, but despite more than two decades of intense research, experimental performance continues to lag theoretical expectations. Here, we develop an oxygen-free approach to fabricate 2D field-effect transistors and push the electrical transport toward the theoretical phonon-limited intrinsic mobility. This approach achieves record carrier mobilities of 91 and 132 cm² V^-1 s^-1 for mono- and bilayer MoS₂ transistors on silicon oxide substrates. Statistical analysis of over 60 MoS₂ and WS₂ devices confirms that oxygen-free fabrication enhances device performance by more than an order of magnitude across key figures of merit. While previous studies suggest that 2D transition metal dichalcogenides such as MoS₂ and WS₂ are relatively stable in air, we show that even short-term ambient exposure can degrade their performance. We identify oxygen as a crucial factor in limiting transistor performance through irreversible chemisorption. This study emphasizes the criticality of avoiding oxygen exposure and offers guidance for device manufacturing that impacts fundamental research and practical applications of 2D materials.