An Annular Conductive Membrane-Based Hollow Capacitive Wind Pressure Sensor: Analytical Solution and Numerical Design and Calibration

A novel hollow capacitive wind pressure sensor is for the first time proposed. The sensing element of the proposed sensor uses a non-parallel plate variable capacitor, whose movable electrode plate uses a transversely uniformly loaded annular conductive membrane with a fixed outer edge and a rigid inner edge (acting as the wind pressure sensitive element of the sensor). Due to the unique hollow configuration of the proposed sensor, it can be used alone to detect the pressure exerted by fast-moving air in the atmosphere or by fast-moving air or gas, etc., in pipes, but it also can be used in pairs to measure the flow rate of fast-moving air or gas, etc., in pipes. The analytical solution of the large deflection elastic behavior of the transversely uniformly loaded annular conductive membrane is derived by using a new set of membrane governing equations. The effectiveness of the new analytical solution is analyzed. The new membrane governing equations are compared with the previous ones to show the differences between them. The superiority of the new analytical solution over the existing ones is analyzed. An example is given to demonstrate the numerical design and calibration of the proposed sensor and the effect of changing design parameters on the important capacitance-pressure (<i>C</i>-<i>q</i>) analytical relationship of the proposed sensor is investigated comprehensively. Finally, an experimental verification of the analytical solution derived is carried out.