PCM-Based Bandwidth-Reconfigurable Acoustic-Wave Filter

We present the design, fabrication, and experimental testing of bandwidth-reconfigurable surface acoustic-wave (SAW) filters with integrated vanadium dioxide (VO2)-based radio frequency (RF) switches. We propose a design that utilizes the phase-change properties of VO2, which transitions between insulating and conductive states to enable dynamic reconfiguration of the SAW filter bandwidth. By modifying the interdigital transducer (IDT) configurations, the electromechanical coupling coefficient (k2) of the resonators can be varied, thus enabling the reconfiguration across different bandwidths. Experimental results demonstrated the bandwidth adjustability offered by the proposed design, and the fabricated prototype filters suggested that monolithically integrated VO2-based RF switches can provide a flexible solution for reconfigurable acoustic filters. To the best of our knowledge, this work represents the first demonstration of bandwidth-reconfigurable acoustic filters with monolithically integrated RF switches with acoustic resonators.