Research on On-chip SIW Filter by MMIC Technology with Silicon-based Semiconductor

In this paper, an on-chip substrate integrated waveguide (SIW) filter with a center frequency of 26 GHz and a bandwidth of $\mathbf{1 3. 4 6 \%}$ based on Microwave Monolithic Integrated Circuit (MMIC) is designed and simulated. The substrate of the SIW filter changes from traditional materials to silicon-based semiconductor such as GaN -on- Si and $\mathrm{GaAs}-o n-\mathrm{Si}$, so it can be integrated with active and passive devices on-chip. This design not only saves space, but also modularizes the fixed-band on-chip filter, so that users can get more convenient usage and more accurate effect of filter.