Study on the parameters of DLC coating preparation process based on COMSOL

Abstract The process of preparing DLC coatings by vacuum evaporation was simulated using COMSOL software. The distance between the evaporation source and the substrate, as well as the temperature of the evaporation source, were changed, and the influence of these parameters on the quality of the coating was analyzed. The results of the simulation experiment indicate that the coating prepared by vacuum evaporation has the thickest center and thinner edges compared to the center. Appropriately increasing the distance between the evaporation source and the substrate material can improve the uniformity of the coating; Raising the temperature has a significant impact on accelerating the sedimentation rate.