Fabrication and Parameter Study of High Performance Zinc Oxide Piezoelectric Films for Flexible Surface Acoustic Wave Biosensors

Current methods for assessing chronic wounds are quite limited, and traditional examination techniques may cause secondary damage to the wound. To address this issue, researchers have proposed biosensors for real-time monitoring of wound conditions. Flexible Surface Acoustic Wave (FSA W) sensors, with their advantages of high biocompatibility, high sensitivity, miniaturization, and mass manufacturability, have emerged as an ideal choice for wound monitoring. These sensors consist of a flexible substrate, piezoelectric film, interdigital transducers (IDT), and a sensitive layer. However, the fabrication of high-quality piezoelectric films presents several challenges, including material selection, crystal quality, deposition rate, and process stability. Therefore, this study aims to investigate the fabrication techniques for high-performance piezoelectric films in FSA W biosensors, focusing on preparation methods and optimization strategies under various process conditions.