Trends in MEMS-Based Energy Harvesting Technologies: A Bibliometric Analysis

Research on micro-electro-mechanical systems (MEMS) energy harvesting technologies is gaining increasing attention and contributing significantly to energy substitution and sustainable development. Although a large number of research activities have been carried out in the last few years, efforts to analyze in depth the impact of these studies in the field are still limited. The article quantitatively analyzes and visualizes the relevant screened literature from Web of Science (WoS) using VOSviewer and CiteSpace, and provides an in-depth discussion of the research hotspots, evolutionary paths, and development trends in this field. The study found that the trend of research on the technology has risen steadily in recent years. Among many countries, the United States has conducted the most research projects. In addition, the research hotspots in this field mainly focus on MEMS vibration energy harvesters, new multifunctional materials and structures, as well as the overall integration and performance optimization of energy harvesting systems. In recent years, thanks to the promotion of emerging technologies, the research depth and breadth of this field has expanded rapidly. To summarize, the mainstream research hotspots and future development directions in this field have gradually become clear. Finally, this paper provides some insights for later researchers, suggesting that attention should be paid to the application of emerging technologies and interdisciplinary cooperation in order to promote the further development of energy harvesting technology for MEMS.