Reliability Improvement of Acoustofluidic Devices for Cell Separation Through Optimized Micro/Nano Fabrication Processes

This paper presents the fabrication process and reliability enhancement of surface acoustic wave (SAW) microfluidic chips, specifically designed for the critical task of separating circulating tumor cells (CTCs) from red blood cells (RBCs), a pivotal step in both clinical diagnostics and biological research. The acoustofluidic device integrates interdigital transducers (IDTs) and polydimethylsiloxane (PDMS) chambers, created through advanced micro/nano-fabrication techniques such as photolithography and electron beam deposition. The study explores how key fabrication parameters, including exposure energy and development time, affect the structural and functional integrity of SAW devices. We also address the challenges involved in fabricating thinfilm electrodes and investigates the critical role of hard baking in forming durable microfluidic channels. Insights from this study contribute to advancing the reliability of microfluidic chips, though further research is necessary to fully comprehend the long-term impact of fabrication variations on device performance.