A Regression-Based Approach to Optimize Curved Beam Parameters for Micro-Scale Bistable Actuation

The research described the design and analysis of a bistable actuator for MEMS devices using a curved beam structure. The investigation revolves around the optimization of length, width, and apex height of the microstructure to deflect it to the actuated position. The mechanical behavior was validated using Finite Element Analysis using Ansys Multiphysics with a deviation of 1.94%. The result shows that the beam maintains its second stable state without continuous application of the force which significantly reduces the power consumption.