Control of the Surface Modification of Epoxy Resin by VUV-Redox Method using Vacuum Ultraviolet Light

This study evaluates the adhesion strength between epoxy and copper, employing vacuum ultraviolet (VUV) light treatment on epoxy resin as a pre-treatment for medium vacuum sputtering. To augment the concentration of hydroxyl groups on the resin surface, we modified the VUV light irradiation atmosphere using reducing and redox gases. We assessed the changes in contact angle and adhesion strength. The VUV-Redox method was found to generate COH groups on the epoxy resin surface, thereby enhancing the adhesion at the interface between epoxy resin and copper.