Design of cathode power supplies for electron beam coating systems
A cathode power supply is designed to meet the practical application requirements of electron beam high voltage power supplies used in vacuum coating. A full-bridge Inductor and Capacitor (LC) series resonant converter be used in this design. The power supply achieves a stable Direct Current (DC) output at the output side through a transformer step-up structure. The influence of the LC resonant converter on voltage gain under different operating conditions is analyzed, along with the working state analysis and design methods for the transformer. Calculations for the main circuit are conduct-ed, and a prototype of the cathode power supply is developed based on the de-sign. Finally, experiments validate that the power supply meets the requirements for stable output.
Authors
- Shaofeng Han (ORCID: https://orcid.org/0000-0002-0873-002X)
- Renbo Wu
- Zhi‐Gang Chen (ORCID: https://orcid.org/0000-0002-9309-7993)
- Shengwen Fan
Institutions
- North China University of Technology (CN)
Publication Details
- Published
- 2024-09-20
- DOI
- https://doi.org/10.1109/epee63731.2024.10875384
- Primary Topic
- Electron and X-Ray Spectroscopy Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00