Grating Phase Error Compensation Principle and System Design Based on FPGA

Grating measurement technology is a high-precision measurement technology based on counting the moire fringes formed by the grating. Based on the characteristics of grating sensor signals and signal segmentation technology,we proposes the principle of phase error compensation. The grating phase error compensation system with FPGA as the processing core is designed to make the two non orthogonal signals orthogonal through phase compensation. The design can improve the grating subdivision accuracy, enhance the environmental adaptability and anti-interference ability of fringe measurement technology.