Controllable Growth of Wafer‐Scale Te <sub>1‐x</sub> Se <sub>x</sub> Thin Films Based on Selenium Phase Change‐Induced Strategy for Single‐Pixel Imaging
Recently, Te<sub>1-x</sub>Se<sub>x</sub> films have shown significant potential for infrared detection. However, the conventional deposition process of Te<sub>1-x</sub>Se<sub>x</sub> films typically requires a cooled substrate, which results in the formation of poorly crystallized materials. Achieving controlled synthesis of large-area Te<sub>1-x</sub>Se<sub>x</sub> films remains a major challenge. Herein, two-inch Te<sub>1-x</sub>Se<sub>x</sub> films is successfully prepared using a low-pressure chemical vapor deposition technique based on a selenium phase transition-induced strategy. The chemical compositions of Te<sub>1-x</sub>Se<sub>x</sub> (x ranging from 0 to 1) films can be precisely controlled by adjusting the molar ratio of Te and Se powders. The phase change of amorphous Se at elevated temperatures generates additional dangling bonds on its surface, which facilitates the incorporation of Te atoms into Se chains forming Te<sub>1-x</sub>Se<sub>x</sub> alloys. COMSOL simulations reveal that maintaining uniform concentration and temperature during the growth process is essential for the formation of Te<sub>1-x</sub>Se<sub>x</sub> films. Importantly, the Te<sub>0.4</sub>Se<sub>0.6</sub> film detector realizes high-performance near-infrared single-pixel imaging with a resolution of 128 × 128 pixels. This work has fabricated wafer-scale Te<sub>1-x</sub>Se<sub>x</sub> alloy thin films, which exhibit excellent properties, providing important experimental and theoretical support for exploring the applications in the fields of electronics, photonics, and optoelectronics.
Authors
- Guolin Hao (ORCID: https://orcid.org/0000-0001-6856-3174)
- Yulong Hao (ORCID: https://orcid.org/0009-0003-2243-4205)
- Huan Zhou (ORCID: https://orcid.org/0009-0000-1407-1430)
- Jie Zhou (ORCID: https://orcid.org/0000-0001-6508-8478)
- Xuemei Lu (ORCID: https://orcid.org/0000-0002-0571-1472)
- Yongqiang Yu (ORCID: https://orcid.org/0000-0002-7806-1095)
- Yunbo Lu
- Shiwei Zhang (ORCID: https://orcid.org/0009-0006-1515-6536)
- Shijie Hao
Institutions
- Hefei University of Technology (CN)
- Guangxi Normal University (CN)
- Collaborative Innovation Center of Advanced Microstructures (CN)
- Xiangtan University (CN)
- Nanjing University (CN)
Publication Details
- Journal
- Small Methods
- Published
- 2025-02-16
- DOI
- https://doi.org/10.1002/smtd.202402014
- Citations
- 7
- Primary Topic
- Chalcogenide Semiconductor Thin Films
- Type
- article
- Field-Weighted Citation Impact
- 5.11
Funders
- Innovative Research Group Project of the National Natural Science Foundation of China
- Xiangtan University
- Key Research and Development Program of Hunan Province of China