Glow Discharge Plasma Polarization Effect on Piezoelectric and Surface Properties of PVDF Film

The work is devoted to the development of a system modes for the PVDF films polarization in a glow discharge plasma. The choice of polarization method in a glow discharge plasma has been justified through comparison of modern polarization methods. Requirements for a plasma polarization unit are formulated. The choice of the frame concept of the electrode system is justified and the design of a created unit is described. A study of the influence of glow discharge plasma treatment on PVDF film surface properties was carried out. AFM scans of the surfaces of untreated and plasma treated samples of PVDF films are shown. The comparison of IR spectra of PVDF film treated in a glow discharge plasma at specified parameters of the processing mode and spectra of exact untreated were analyzed. The fact of glow discharge plasma polarization ability to pole a PVDF film is justified by results of polled 28 μm-thick PVDF film samples d33 measurements.