Sensors with Transparent Electrodes Based on Polymer Ferroelectric PVDF Films

the work examines the areas of application of sensors based on ferroelectric PVDF films and shows that for many applications the transparency of sensors is an important property. ITO thin film electrodes are used to maintain the transparency of the original PVDF film. In this paper, the dependence of the optical transmission and surface resistance of thin ITO films with a thickness of 100 nm obtained by direct magnetron sputtering at direct current on the value of the sputtering power is studied. It was found that in the studied power range, the best ratio of the optical transmission coefficient of 82% and the surface resistance of 83.9 ohms/sq corresponds to a spray power of 100 W.