The Influence of Annealing Temperature on the Piezoelectric Properties of SBTN Structures

The influence of various parameters, such as annealing temperature and Nb content, on the structure and piezoelectric properties of thin-film structures based on the SBTN sol-gel layer are determined. The values of piezoresponse were investigated, and experiments on local polarization switching were carried out. Dependencies of the piezoelectric coefficients on the composition of the SBTN layer and the parameters of the sol-gel process were established.

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Published
2024-10-01
DOI
https://doi.org/10.1109/icct62929.2024.10874942
Primary Topic
Acoustic Wave Resonator Technologies
Type
article
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article

The Influence of Annealing Temperature on the Piezoelectric Properties of SBTN Structures

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Acoustic Wave Resonator Technologies
article

The Influence of Annealing Temperature on the Piezoelectric Properties of SBTN Structures

Sergei Khakhomov, Yu. V. Nikityuk, Yaroslav Solovyov, Alina V. Semchenko, Г. В. Чучева, Dmitry A. Kiselev, Vitali V. Sidski, В И Пилипенко
article en

Abstract

The influence of various parameters, such as annealing temperature and Nb content, on the structure and piezoelectric properties of thin-film structures based on the SBTN sol-gel layer are determined. The values of piezoresponse were investigated, and experiments on local polarization switching were carried out. Dependencies of the piezoelectric coefficients on the composition of the SBTN layer and the parameters of the sol-gel process were established.

Francisk Skorina Gomel State University (BY), The Joint Institute of Mechanical Engineering (BY), Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences (RU), Institute Belniis (BY)
Openalex Percentile: Top 76%
Acoustic Wave Resonator Technologies
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