Multimodal Scanning Microwave and Electron Microscopy for nanoscale measurements under vacuum

A Near-Field Scanning Microwave Microscope (NSMM) is operated inside a Scanning Electron Microscope (SEM). This experimental setup combines atomic force microscopy, microwave measurements (potentially up to 67 GHz), and SEM. With the piece of equipment, we investigate the potential benefits of observing at the nanoscale with SEM before and during NSMM experiments in the objective to improve quantification of measurements. We use a calibration method based on capacitance – probe to sample distance to convert S parameters into the admittance of the probe-sample structure. Based on this procedure, we discuss the potentialities and limitations of NSMM to image capacitances in the aF range on Si/SiO2 surfaces.