Study on the characteristics of inductively coupled plasma discharge at different frequencies under air background

Abstract Simulation of the two-dimensional axisymmetric inductively coupled plasma (ICP) discharge model under air background is carried out through the finite element simulation software COMSOL Multiphysics based on the hydrodynamic equations. The changes and distribution characteristics of plasma parameters are obtained and analyzed during the discharge process, including the electron density, the electronic temperature, and the macro-gas temperature of the plasma. The influence of different frequencies on flow field characteristics of ICP in the background of air is studied. The model fixed the input discharge power of 1000W and the pressure of 20Pa. The research results indicate that the plasma appears in the middle of the discharge chamber and gradually dissipates along the direction of the chamber wall. The macro-gas temperature near the inductive coil is higher than in other areas. In addition, rising discharge frequencies will lead to a decrease in plasma conductivity, which will cause the research object of plasma to gradually decrease. The proportion of O 2 not only affects the relevant feature parameters of plasma, but also has an impact on the distribution of the spatial space of plasma.