Numerical simulation of the effect of Faraday cage on the inductively coupled plasma discharge

Abstract Taking inductively coupled plasma (ICP) as the research object, a method of increasing the electron density of ICP by Faraday cage electromagnetic shielding is proposed. At the same time, the introduction of the Faraday cage can effectively prevent the electromagnetic interference caused by the discharge coil, which is helpful in reproducing the real near-space plasma environment in the laboratory. Based on COMSOL Multiphysics, a two-dimensional inductively coupled plasma discharge model was constructed, and the effect of the Faraday cage on ICP discharge parameters was comparatively studied. The simulation results show that the Faraday cage can effectively shield the electromagnetic interference caused by the discharge coil. At the same time, the Faraday cage can increase the electron density and the electron temperature of the plasma to a certain extent, and the plasma is evenly distributed in this case. With the increase of discharge power, the electromagnetic shielding effect of the Faraday cage is still effective, and the effect on the plasma electron density is more obvious.