Deposition and Characterization of Zinc–Tin Oxide Thin Films with Varying Material Compositions

Zinc–tin oxide (ZTO) thin films (ZnO)x(SnO2)1−x with different material composition x (0 < x < 1) are deposited by spin coating on glass substrates at room temperature. The Differential Scanning Calorimetry (DSC) data of the precursor compounds show gradual phase transitions up to 480 °C. These data are used for an appropriate regime for thermal annealing of the layers. X-ray photoelectron spectroscopy (XPS) data show mixed oxide compound formation in states Zn2+, Sn4+ and O2− of the constituents. Optical investigation manifests high transmittance above 80% in the visible spectral range and an optical band gap of 3.3–3.7 eV. The work functions vary between 4.1 eV and 5 eV, depending on the annealing, with deviations less than 1% for surface 1 mm2 scans. Stack devices ITO/ZTO/metal with different metal contacts are formed. The I–V (current–voltage) measurements of the fabricated stacks exhibit Ohmic or nonlinear behavior, depending on the material composition and the work function levels.