Performance Analysis of Biosensor Based on Inverted T Shaped Junctionless FinFET

This paper shows a comprehensive investigation on detecting biological species using a junctionless FinFET with an inverse T-shaped fin, designed at the 14 nm technology node. The device features a 4 nm nano-cavity on each side of the channel, positioned between the gate and the fin. This cavity serves as a sensor for biological molecules. To minimize leakage current, the proposed structure incorporates a double oxide material surrounding the channel and cavity. The cavity is designed with a rectangular shape. The analysis, conducted using a TCAD simulation tool, focuses on the sensitivity of the biosensor. Different biomolecules, including Keratin (K=8), Streptavidin (K=2.15), Aminopropyltriethoxysilane (APTES), and, are examined to assess the biosensor's performance. The results demonstrate the device's potential for highly efficient and accurate biosensing by analyzing its electrical characteristics, sensitivity, and detection limits. Proposed biosensor shown the 42% higher sensitivity when the no charge particles added in the cavity and dielectric constant vary from 2.15 to 8.