Parametric Studies of a Clamped-to-Clamped Resonant Beam Microelectromechanical System Based Acce,lerometer

This work has reported an advanced microelectromechanical system (MEMS) based vibrating beam accelerometer. Parametric analysis is done for Clamped vibrating beam. Multiple modes of simulation have been performed for the vibrating beam. Using the finite element method FEM model, natural frequency of the vibrating beam was found to be 123 kHz. Natural frequency varies with dimensions, except for the thickness, an independent feature that remains constant regardless of changes in length or width. Axially pressure applied to the beam has been performed and found shift in frequency. Additionally, bias analysis of the vibrating beam has been studied.