Fault Tolerant Control for Pieoelectric Actuator Based Micro-Nano Positioning Platform

In this paper, fault tolerant control problem is considered for piezoelectric positioning platform. Firstly, the hysteresis nonlinear characteristic of the piezoelectric actuator is described by a Hammerstein model, where in the static nonlinear part is described by classical PI (Prandtl-Ishlinskii) model, and the dynamic linear part is represented by a rate-dependent second-order transfer function. Then, based on this model, a Lu-enberger observer is designed for fault detection, and a Cubature Kalman Filter (CKF) is utilized for fault estimation. Furthermore, a controller is proposed to compensate for the detected faults and the stability is analyzed by Lyapunov method. Finally the simulation results validate the rationality and validity of proposed methods.