Development of angular multiplexing MOPA system of high-power XeCl excimer laser experimental platform

High power excimer laser has significant technical advantages such as good irradiation uniformity on target surface, repeatable operation and high electro-optical efficiency. It has played an important role in the research fields of inertial confinement fusion, high energy density physics and plasma physics. In this paper, the development of angular multiplexing MOPA system of a high power XeCl excimer laser experimental platform is introduced, including system design, engineering design, system construction, platform performance test and so on. Through the development of the system, the performance index of the experimental platform is significantly improved, including the pulse width is compressed from 200ns to 2~8ns (adjustable), the focal spot on the target surface is compressed from mm level to 260~800μm (adjustable), the power density is increased from 10¹¹W/cm² to 10¹³W/cm², and the uniformity of single beam spot on the target surface reaches 5.2%, while the spot uniformity of 18 laser beams reaches 2.0%.