Study on discharge characteristic of surface-discharge optical pumping source on BN ceramic

In order to obtain strong vacuum ultraviolet radiation, a surface-discharge optical pump source on BN ceramics was developed. The discharge characteristics of the surface-discharge optical pump source were studied by using discharge voltage waveform and discharge current waveform, and the radiation spectra of the pump source were measured. The parameters such as discharge period, discharge current and so on are obtained, the equivalent inductance, resistance, energy deposition efficiency and plasma power density of the discharge channel are calculated, and the radiation brightness temperature of the pump source is analyzed. It is found that a higher efficiency and higher radiation temperature of BN ceramic surface discharge optical pump source is obtain by increasing charging voltage and working gas pressure. When the charging voltage is 26.8kV, the energy deposition efficiency of pump source is above 80% under the condition of working gas pressure 100kPa and discharge gap length of 8cm, the power density of discharge plasma reaches 8.61MW/ cm.