Aspheric surface measurement using multiplane phase retrieval with varying curvature illumination

Aspherical optical elements are widely used in the fields of astronomy, aerospace, laser and optical communication to improve the imaging quality of optical systems, and the wavefront error measurement is of great significance for its machining and application. In this paper, a simple and fast measurement method for aspherical elements based on multiplane phase retrieval is proposed and the corresponding reconstruction algorithm is established. We report on the experimental demonstration that the wavefront error and focal length of aspherical optical elements with high precision can be achieved by applying this method.