Comparative Assessment of Surface Lattice Resonance Characteristics in Plasmonic Titanium Nitride and Gold Nanodisk Arrays

Titanium nitride (TiN) is an advantageous material for plasmonic applications and is suitable for extreme conditions in which conventional plasmonic materials such as gold (Au) cannot be utilized. In this study, TiN and Au nanodisk arrays with different lattice spacing (Λ) were fabricated using the electron beam lithography (EBL) method to increase the quality factor of TiN. At a period of 550 nm, the TiN nanodisk arrays demonstrate a higher sensitivity, 412.79 nm·RIU−1, with the plasmonic resonance wavelength shifting from 883 nm (n = 1.3335) to 915 nm (n = 1.4069) in the NIR region. The surface lattice resonance (SLR) properties of the produced TiN nanodisk arrays were investigated in detail with Au nanodisk arrays. The TiN nanodisk arrays caused sharp plasmon resonances by creating a localized plasmon vibration mode coupled with the diffractive grazing wave excited by the incident light. The transmission dips obtained at narrower full width at half maximum (FWHM) values caused at least an almost 10-fold improvement in the quality factor compared to localized surface plasmon resonance (LSPR) dips. This study is significant for assessing the surface plasmon resonance characteristics of TiN and Au nanodisk arrays across various periods and indices.