Monte Carlo study of the electron emission yields of germanium

Though extensive experiments have been performed in the past to measure electron emission properties under electron beam bombardment, reliable measured data for clean and smooth surfaces are still lacking for most elemental solids. In this study, we have conducted a comprehensive Monte Carlo simulation to examine electron emission yields, including secondary electron yield (SEY), backscattering coefficient (BSC), and total electron yield (TEY), for germanium. The uncertainties associated with theoretical calculations have also been assessed with a total of 4608 scattering models by considering several dominant factors that can influence the calculated yields, i.e., optical energy loss function dataset, work function data, dielectric function model for electron inelastic scattering, and scattering potential for electron elastic scattering. Our results indicate that the work function value significantly affects the simulated SEY, and the energy loss function dataset and elastic scattering potential moderately influence both SEY and BSC. Our simulated BSC data are somewhat higher than most of the experimental measurements, while the simulated SEY data are mostly lower than the experimental data within the estimated theoretical uncertainty. This study highlights the critical need for establishing an accurate database of electron emission yields using theoretical modeling, considering particularly the unreliability of the previous experimental data caused by surface contamination during measurements.