Simulation of LED sorting control based on feedforward filter compensation
Aiming at the wafer arrangement accuracy problem in the LED sorting process, this paper investigates the positioning error of the swing arm motor. Optimization was conducted on the positioning control of the swing arm motor using feedforward control and filters, incorporating velocity and acceleration feedforward coefficients into the existing PID three-loop control system to enhance the motor’s response speed. Additionally, a TD filter is added to reduce the overshoot of the system and improve the following and anti-interference ability of the system. The experimental results indicate that the enhanced control algorithm reduced the alignment error of the chips in the $X / Y$ directions from ± 30um to ± 15um, significantly enhancing the alignment accuracy of the chips.
Authors
- Zhengyin Liang (ORCID: https://orcid.org/0000-0002-8307-494X)
- Sha Sheng
- Yong Wang (ORCID: https://orcid.org/0000-0003-3366-3137)
- Zili Xiong (ORCID: https://orcid.org/0009-0007-9865-2849)
- Jiangdan Su
Institutions
- Beijing Institute of Petrochemical Technology (CN)
Publication Details
- Published
- 2024-10-25
- DOI
- https://doi.org/10.1109/icemce64157.2024.10862282
- Primary Topic
- Advanced Measurement and Detection Methods
- Type
- article
- Field-Weighted Citation Impact
- 0.00