Gas Phase Composition and Kinetics of Fluorine Atoms in SF6 Plasma

A model study of the composition of the neutral and charged components of SF6 plasma is conducted in a wide range of electron concentrations. Key plasma-chemical processes that form stationary concentrations of fluorine atoms in low- and high-density plasma conditions are identified. It is shown that optimized (reduced due to inefficient reactions) kinetic schemes provide satisfactory agreement between the calculation results and experimental data from published sources.