BadgerFilm: A new thin film analysis programme (with other useful applications for EPMA)

Abstract Characterisation of thin films upon substrates, i.e., thickness and composition determination, can be performed using the non-destructive technique of electron probe microanalysis (EPMA). This technique, first introduced in the 1960’s and refined in the 1990’s, is based on the accurate description of the electron ionisation depth distribution, the so-called ϕ ( ρz )-distribution. Using these models, several thin film analysis computer programmes have been developed and distributed. However, these programmes have some limitations: (1) older programmes may not be compatible with modern computer systems; (2) the majority of the programmes are “black boxes” making it difficult to assess the reliability of the quantification results; and (3) commercial programmes can be expensive and this might prevent a lab from acquiring one of them especially when demands for thin film quantification are occasional. And experience has shown that where an EPMA lab is searching for funds and new users/customers, the ability to do thin film characterisation can be valuable. In this article, we present the thin film analysis programme BADGERFILM. The programme is free, open-source and implements documented ϕ ( ρz )-models and algorithms. The programme is versatile and can be used to characterise multilayer samples but also bulk samples. BADGERFILM demonstrated excellent quantification results for the films and for the substrates when compared to other EPMA thin film analysis programmes and to other techniques. BADGERFILM can also be employed to calculate mass absorption coefficients from multi-voltage EPMA measurements and can calculate absolute X-ray intensities directly comparable to Monte Carlo simulations.