Analysis of MEMS Piezoresistive Pressure Sensor with Dual-Island Structures using Circular Silicon Diaphragm

The purpose of the work present the development and proposal of pressure sensors for microelectromechanical systems (MEMS). This work covers the design and testing of the sensor. MEMS pressure sensors are engineered to cater to a broad spectrum of pressure demands which includes high sensitivity, with the help of the theory of elasticity and circular diaphragm mechanism parameters like stress, strain and deflection are obtained, with help of the COMSOL Multiphysics software. With the help of the software, visualizing the estimated parameters in great detail is attainable and it backs up the theory used as well. A pressure sensor having a beam-membrane-dual-island with piezoresistive construction is created that fulfils the purpose of measuring micro-pressure which have high sensitivity and resistance to overload. A unique construction that blends beams with sensitive nature with a traditional bossed diagram, is used to analyse stress distribution with the help of the finite element approach (FEA). 5MPa pressure is applied to observe the outcome provided by pressure sensor when applied on island structure.