A 930MHz Low Phase Noise MEMS Oscillator

A 930 MHz complementary cross-coupled MEMS oscillator with Darlington cell is proposed to effectively reduce the power consumption and optimize phase noise of the circuit in this paper. The circuit is designed using SMIC 55 nm CMOS process with a phase noise of $\mathbf{- 1 3 6. 5} \mathbf{~ d B c} / \mathbf{H z}$ and Figure of Merit (FOM) of 224.6 at 100 kHz offset frequency, an overall circuit power consumption of $134 \mu \mathrm{~W}$ at 1.2 V supply voltage, a start-up time of $14.8 \mu \mathrm{~s}$, and a core circuit layout area of $85 \times 87 \mu \mathrm{~m}^{2}$.