Fabrication of Y-cut LiNbO<sub>3</sub> Single Crystalline Film and SAW Resonator on Flexible Polyimide Substrate
Flexible surface acoustic wave (SAW) resonators on single crystal LiNbO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>(LN) film have been successfully fabricated using benzocyclobutene bonding and crystal ion slicing technology. The effects of Polyimide (PI) thickness on the properties of LN film have been studied. 960 nm LN single crystal films without cracks have been transferred to $25 \mu \mathrm{~m}$ PI substrates, which are used to construct flexible SAW resonators. The flexible SAW resonators show well frequency-strain response characteristics. These results demonstrated that LN single crystal film on PI substrate and its SAW resonator is a promising candidate in flexible electronic devices.
Authors
- Wenbo Luo (ORCID: https://orcid.org/0000-0002-9933-7417)
- Dailei Zhu
- Wanli Zhang (ORCID: https://orcid.org/0000-0001-6614-374X)
- Xinqiang Pan (ORCID: https://orcid.org/0000-0001-6165-855X)
- Wei Fan (ORCID: https://orcid.org/0000-0002-8439-5809)
- Yao Shuai (ORCID: https://orcid.org/0000-0001-5268-5812)
- Xuming Wang (ORCID: https://orcid.org/0000-0002-2266-8816)
- Yizhuo Gao (ORCID: https://orcid.org/0009-0002-0851-4666)
- Shitian Huang
- Chuangui Wu
Institutions
- University of Electronic Science and Technology of China (CN)
Publication Details
- Published
- 2024-10-25
- DOI
- https://doi.org/10.1109/icta64028.2024.10860705
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00