Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project
The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices based on graphene and related two-dimensional (2D) materials, namely the Experimental Pilot Line (2D-EPL) project. Here, we report the results obtained during the first and third multi-project wafer (MPW) runs completed at the end of 2022 (MPW run 1) and 2023 (MPW run 3) as an outcome of the 2D-EPL. Test devices were measured across the wafers to assess the device quality and variability before delivering the fabricated dies to the customers. Raman spectroscopy confirmed minimal structural changes in the graphene caused by the fabrication process, while electrical measurements of two different device types verified the device specifications defined in the process design kit.
Authors
- Martin Otto (ORCID: https://orcid.org/0000-0001-6704-3468)
- Bartos Chmielak (ORCID: https://orcid.org/0000-0003-3574-570X)
- Florian Schlachter
- Eros Reato (ORCID: https://orcid.org/0000-0002-7418-0089)
- Andreas Hemmetter (ORCID: https://orcid.org/0000-0002-0932-2183)
- Daniel Neumaier (ORCID: https://orcid.org/0000-0002-7394-9159)
- Zhenxing Wang (ORCID: https://orcid.org/0000-0002-2103-7692)
- Bárbara Canto (ORCID: https://orcid.org/0000-0001-5885-9852)
- Bianca Robertz
- Alba Centeno (ORCID: https://orcid.org/0000-0001-8442-2283)
- Sarah L. Stoll (ORCID: https://orcid.org/0000-0001-7184-8672)
- Arantxa Maestre
- Gordon Rinke (ORCID: https://orcid.org/0000-0001-9495-5307)
- Max C. Lemme (ORCID: https://orcid.org/0000-0003-4552-2411)
- Amaia Zurutuza (ORCID: https://orcid.org/0000-0001-6376-0224)
- Sha Li (ORCID: https://orcid.org/0000-0002-6520-6806)
- Lisa Ehlert
Institutions
- University of Wuppertal (DE)
- AMO (Germany) (DE)
- ASM International (Belgium) (BE)
- Graphenea (Spain) (ES)
- Heraeus (Germany) (DE)
- RWTH Aachen University (DE)
Publication Details
- Journal
- Nature Communications
- Published
- 2025-02-06
- DOI
- https://doi.org/10.1038/s41467-025-56357-0
- Citations
- 15
- Primary Topic
- Graphene research and applications
- Type
- article
- Field-Weighted Citation Impact
- 7.77
Funders
- Graphene Flagship
- European Commission
- Horizon 2020 Framework Programme
- HORIZON EUROPE Framework Programme