A new preparation method for an FPI sensor with a PDMS film
Small-sized, highly sensitive pressure sensors are crucial in the field of turbomachinery application. In this paper, we present a l low-cost and user-friendly method for producing PDMS films with thicknesses about 10μm and the preparation method and process are described in detail. The PDMS films we fabricated have thicknesses of 11.5μm and 9.2μm. After the prepared FPI was cured and packaged, the characteristics of the sensor were studied theoretically and experimentally. The pressure sensitivity of the two groups with similar cavity length is 23.04nm/Mpa and 29.64nm/Mpa. This method provides a novel approach for the large-scale, low-cost production of 10-micron-level PDMS thin-film FPI.
Authors
- Houquan Liu (ORCID: https://orcid.org/0000-0001-5130-7326)
- Yi Tang (ORCID: https://orcid.org/0000-0002-2250-6024)
- Yiming Xiao (ORCID: https://orcid.org/0000-0001-6557-9605)
- Libo Yuan (ORCID: https://orcid.org/0000-0002-2425-4553)
- Li Yang (ORCID: https://orcid.org/0000-0002-7432-8178)
- Yu Cheng
Institutions
- Guilin University of Electronic Technology (CN)
Publication Details
- Published
- 2025-02-05
- DOI
- https://doi.org/10.1117/12.3055779
- Primary Topic
- Analytical Chemistry and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00