Local Hot-Spot Quench Test and Analysis on High Temperature Superconductor Coils for a Single Silicon Crystal Growth System

The fast growth of semiconductor Integrated Circuit industry gains a significant focus on producing high-quality silicon wafers with larger diameters. High temperature superconductor (HTS) magnets can generate high static magnetic fields at high operating temperature, which can be used to improve the quality of single silicon crystal. The No-Insulation (NI) and Metal-Insulated (MI) HTS coils show great advantages on enhanced thermal stability and are the best candidates for high-quality silicon wafer production. However, these HTS coils face challenges related to the slow propagation speed of quench events, leading to the occurrence of local hot-spot quench while other sections continue to operate in the superconducting state. Recent studies reveal that local hot spots in NI and MI HTS coils cause central magnetic field reductions, making magnetic field-based quench detection an effective method, particularly suitable for single silicon growth systems that require magnetic field monitoring. Therefore, this study aims to experimentally investigate and analyze the local hot-spot quench in NI HTS coils, as well as in metal-insulated and insulated HTS coils. Distributed voltage taps and Hall sensors are used to monitor quench signals created by heater. The experiment measured the voltage and magnetic field characteristics of these coils during the quench, showing that the magnetic field based quench detection method is effective. This study provides data support for understanding the local hot-spot quench properties of HTS coil, offering reference for its design and optimization in applications for high-strength magnetic fields.