Wavelength dependence of thermoreflectance coefficient of TiNi thin film

Abstract The temperature dependence of the reflectance of TiNi thin films was measured using a developed temperature modulation-free thermoreflectance measurement equipment integrated with a precise temperature control system. Consequently, the temperature dependence of the reflectance was successfully measured at three wavelengths with uncertainties confined to within ±3% at 80 °C. In addition, a very low temperature dependence of the reflectance of the order of 10 −6 [1 °C −1 ] was confirmed. The linearity uncertainty of the temperature dependence of the reflectance was evaluated and determined to be within ±15.52%.