KrF exciplexes formation in low temperature plasmas created in various gas mixtures

Krypton fluoride exciplexes are short-lived species that can be generated in the excited state. Excimers and exciplexes do not form stable molecules in the ground state and, for this reason, must be brought to excited states in order to produce them. One method that can lead to the formation of exciplexes is a source based on gas targets and pulsed lasers. Our work focuses on mixture gases investigated using radiation pulses from Xe–He gas puff target and laser-produced plasma. UV/VIS spectroscopy was used in the 200–780 nm range as a diagnostic tool. The diatomic KrF species were observed in emission spectra, mainly in the KrF B and D states. The electron temperature and electron density of plasma containing the exciplexes were determined. The influence of relative intensities of the krypton emission lines and bands, as well as the changes in gas mixtures on the resulting spectra, was analyzed. The results may provide new insights into KrF exciplexes, which have not been studied from this point of view for many years.